Enwere ike ịmegharị ya na ọkụ ọkụ RLS usoro RF, a na-ejikwa ya na etching plasma, mkpuchi, nhicha plasma, mbelata plasma na usoro ndị ọzọ.Mgbe ejiri naanị ya, enwere ike iji ya yana akụrụngwa RF nke ndị nrụpụta ndị ọzọ.