MSD Series sputtering ike ọkọnọ

MSD Series sputtering ike onyonye egosipụtara

Nkọwa dị mkpirikpi:

MSD usoro DC sputtering ike ọkọnọ adopts ụlọ ọrụ si isi DC akara usoro jikọtara na magburu onwe arc nhazi atụmatụ, nke mere na ngwaahịa nwere nnọọ ike ịrụ ọrụ, elu ngwaahịa ntụkwasị obi, obere arc mmebi na ezi usoro repeatability.Nabata ihe ngosi China na Bekee, dị mfe iji rụọ ọrụ.

Nkọwa ngwaahịa

Mkpado ngwaahịa

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Atụmatụ

● Ntinye rack

● Nzaghachi arc ngwa ngwa, oge nzaghachi <100ns

● Nchekwa ike nke ala, <1mJ/kW

● Kọmpat nhazi nhazi, chassis ọkọlọtọ 3U

● Ihe ngosi China / Bekee, dị mfe iji rụọ ọrụ

● njikwa ziri ezi

● Nnukwu mmepụta ihe

● Ọrụ nchebe zuru oke

Nkọwa ngwaahịa

Ntinye	Ntinye voltaji: 3AC380V± 10%
Ntinye	Ike: 20kW, 30kW Ugboro ntinye ike: 50Hz/60Hz
Mpụta	Oke.voltaji mmepụta: 800V
	Oke.mmepụta ugbu a: 50A,75A
	Mpụta dị ugbu a: ≤3% rms
	Mpụta Voltage Ripple: ≤2% rms
Nka nka	voltaji mgbanye: 1000V / 1200V nhọrọ
	Ntughari arụmọrụ: 95%
	Oge nkwụsị: 100ns
	Nkwukọrịta nkwukọrịta: Standard RS485 / RS232 (PROFIBUS, PROFINET, DeviceNet na EtherCAT bụ nhọrọ)
	Akụkụ (HWD)mm: 132482560: 176482700
	Ọnọdụ jụrụ oyi: ikuku jụrụ oyi
Rịba ama: ngwaahịa a na-aga n'ihu na-emepụta ihe na arụmọrụ na-aga n'ihu na-emeziwanye.Nkọwa paramita a bụ naanị maka ntụnye aka.